REVIEW
|
doi:10.20944/preprints201609.0050.v1
Subject:
Engineering,
Chemical Engineering
Keywords:
DCMS, DCMSP, and sputtering; highly ionized pulse plasma magnetron sputtering (HIPIMS); bacterial inactivation kinetics; Cu and TiO2 synergic effects; interfacial charge transfer
Online: 16 September 2016 (13:31:00 CEST)
ARTICLE
|
doi:10.20944/preprints201711.0064.v2
Subject:
Chemistry And Materials Science,
Nanotechnology
Keywords:
reactive multilayer; sputtering; self-propagating reaction; aluminum/nickel; black silicon; joining technology; nanostructured silicon; reactive nanomaterial
Online: 4 December 2017 (05:12:57 CET)
ARTICLE
|
doi:10.20944/preprints201804.0070.v1
Subject:
Chemistry And Materials Science,
Analytical Chemistry
Keywords:
SERS; dragonfly wing; magnetron sputtering; pesticide residue
Online: 5 April 2018 (14:49:08 CEST)
ARTICLE
|
doi:10.20944/preprints201805.0441.v1
Subject:
Chemistry And Materials Science,
Surfaces, Coatings And Films
Keywords:
graphene synthesis; silicon carbide; thin film; high-power impulse magnetron sputtering; thermal decomposition, electronic devices
Online: 30 May 2018 (08:22:05 CEST)
ARTICLE
Subject:
Engineering,
Chemical Engineering
Keywords:
Silicon nitride; RF sputtering; refractive index; FTIR; AFM; SEM
Online: 7 July 2021 (12:05:33 CEST)
ARTICLE
|
doi:10.20944/preprints201810.0386.v1
Subject:
Chemistry And Materials Science,
Surfaces, Coatings And Films
Keywords:
physical vapor deposition; magnetron-sputtering; AlN/Al coating; silicon substrate; residual stresses; wafer curvature method; Nano-scale residual stress profiling; indentation failure modes; nanoindentation adhesion
Online: 17 October 2018 (12:36:39 CEST)
ARTICLE
|
doi:10.20944/preprints202107.0325.v1
Subject:
Chemistry And Materials Science,
Biomaterials
Keywords:
Hexagonal AlN; thin films; Direct current magnetron sputtering; Texture; fiber; heteroepitaxial growth
Online: 14 July 2021 (11:38:28 CEST)
ARTICLE
|
doi:10.20944/preprints201808.0203.v1
Subject:
Chemistry And Materials Science,
Nanotechnology
Keywords:
Titanium dioxide nanotube, photoelectric properties, co-doping, magnetron sputtering
Online: 10 August 2018 (09:43:33 CEST)
ARTICLE
|
doi:10.20944/preprints201806.0140.v1
Subject:
Engineering,
Electrical And Electronic Engineering
Keywords:
Silicon dioxide, Piezoelectric device, Zinc oxide, RF sputtering deposition
Online: 8 June 2018 (14:00:29 CEST)
ARTICLE
|
doi:10.20944/preprints201807.0127.v1
Subject:
Chemistry And Materials Science,
Surfaces, Coatings And Films
Keywords:
magnetron sputtering; TiN/TiCN/TiC film; Cp-Ti; Ti6Al4V; adhesion; scratch; nanoindentation
Online: 9 July 2018 (10:41:21 CEST)
ARTICLE
|
doi:10.20944/preprints202101.0256.v1
Subject:
Chemistry And Materials Science,
Biomaterials
Keywords:
Ti-Cu-Ag thin films; Mechanical properties; Magnetron sputtering; Nanoindentation; FIB-DIC
Online: 13 January 2021 (15:11:02 CET)
ARTICLE
|
doi:10.20944/preprints202109.0513.v1
Subject:
Engineering,
Electrical And Electronic Engineering
Keywords:
Cu Thermal diffusion; Selective etching of Cu; Barrier layer; DC Sputtering; IGZO TFTs
Online: 30 September 2021 (13:09:28 CEST)
ARTICLE
|
doi:10.20944/preprints201807.0160.v1
Subject:
Chemistry And Materials Science,
Surfaces, Coatings And Films
Keywords:
magnetron sputtering; TiN/TiCN/TiC film; Cp-Ti; Ti6Al4V; adhesion; scratch; nanoindentation
Online: 10 July 2018 (06:17:05 CEST)
ARTICLE
|
doi:10.20944/preprints202007.0274.v1
Subject:
Chemistry And Materials Science,
Surfaces, Coatings And Films
Keywords:
tandem cells; magnetron sputtering; Raman Spectroscopy; X-Ray Diffraction; silicon deposition; Optical Transmission Spectroscopy; photocatalytic conversion; hydrogen production; post-sputtering treatments
Online: 13 July 2020 (00:33:58 CEST)
ARTICLE
|
doi:10.20944/preprints202102.0190.v1
Subject:
Engineering,
Automotive Engineering
Keywords:
BIPV; color glass; thin film interference; optical path-length difference; RF Sputtering; nitride; multilayer film
Online: 8 February 2021 (11:13:07 CET)
ARTICLE
|
doi:10.20944/preprints202006.0179.v1
Subject:
Chemistry And Materials Science,
Analytical Chemistry
Keywords:
Heavy metal; Platinum electrode; Ion beam sputtering deposition; Nanoparticle; IBSD; Ion detection
Online: 14 June 2020 (14:46:10 CEST)
ARTICLE
Subject:
Chemistry And Materials Science,
Surfaces, Coatings And Films
Keywords:
GeSn layer; averaged TDD; magnetron sputtering; p-i-n diode
Online: 25 July 2019 (10:29:19 CEST)
ARTICLE
|
doi:10.20944/preprints201812.0298.v1
Subject:
Chemistry And Materials Science,
Surfaces, Coatings And Films
Keywords:
Ti doped ZnO, Thin film, Co-Sputtering, UV-Visible
Online: 25 December 2018 (08:40:43 CET)
ARTICLE
|
doi:10.20944/preprints202006.0342.v1
Subject:
Chemistry And Materials Science,
Analytical Chemistry
Keywords:
Heavy metal; Platinum electrode; Ion beam sputtering deposition; Nanoparticle; IBSD; Ion detection
Online: 28 June 2020 (19:31:19 CEST)
ARTICLE
|
doi:10.20944/preprints202011.0429.v1
Subject:
Chemistry And Materials Science,
Biomaterials
Keywords:
laser ablation; noble-metal films; magnetron sputtering; nanosecond laser pulses; porous nanostructures; plasmonics; nanosponges
Online: 16 November 2020 (15:27:14 CET)
ARTICLE
|
doi:10.20944/preprints202208.0034.v1
Subject:
Physical Sciences,
Applied Physics
Keywords:
surface-enhanced Raman scattering (SERS); silver nanoparticle (AgNP); rhodamine 6G (R6G); dc magnetron sputtering; SERS substrate; hotspot; analytical enhancement factor (AEF); limit of detection (LOD); relative standard deviation (RSD)
Online: 2 August 2022 (04:23:31 CEST)
ARTICLE
|
doi:10.20944/preprints202305.1426.v1
Subject:
Chemistry And Materials Science,
Surfaces, Coatings And Films
Keywords:
copper-nitride semiconductor; RF-magnetron sputtering; spectroscopic ellipsometry
Online: 19 May 2023 (10:11:11 CEST)
ARTICLE
|
doi:10.20944/preprints202305.0981.v1
Subject:
Chemistry And Materials Science,
Materials Science And Technology
Keywords:
Molybdenum; Heat transfer; IR characteristics; Stealth; Sputtering
Online: 15 May 2023 (05:35:06 CEST)
ARTICLE
|
doi:10.20944/preprints202306.1325.v1
Subject:
Physical Sciences,
Applied Physics
Keywords:
high performance ETL TiO2; nanocolumns; glancing angle deposition (GLAD); mag-netron sputtering (MS)
Online: 19 June 2023 (09:32:44 CEST)
ARTICLE
|
doi:10.20944/preprints202307.2082.v1
Subject:
Chemistry And Materials Science,
Surfaces, Coatings And Films
Keywords:
Magnetron sputtering; cerium dioxide; annealing; hardness; surface layer; biocompatibility
Online: 31 July 2023 (10:15:04 CEST)
ARTICLE
|
doi:10.20944/preprints202308.0057.v1
Subject:
Physical Sciences,
Applied Physics
Keywords:
titanium oxynitride; reactive sputtering; gas pulsing; target poisoning; duty cycles; enhanced deposition rate
Online: 1 August 2023 (10:30:59 CEST)
REVIEW
|
doi:10.20944/preprints202209.0162.v1
Subject:
Chemistry And Materials Science,
Surfaces, Coatings And Films
Keywords:
Bi-substituted; RF magnetron; Sputtering; Annealing; Oxygen plasma treatment; Magneto-optic; Faraday rotation; Figure of merit; Hysteresis loop; Imaging; Sensing.
Online: 13 September 2022 (05:53:32 CEST)
ARTICLE
|
doi:10.20944/preprints202403.1172.v1
Subject:
Chemistry And Materials Science,
Surfaces, Coatings And Films
Keywords:
magnetron sputtering; gas-charged Si films; microstructural characterization; IBA analysis; XPS and XAS spectroscopic analyses; Ne, Ar and He solid targets
Online: 19 March 2024 (16:05:14 CET)
ARTICLE
|
doi:10.20944/preprints202305.0267.v1
Subject:
Physical Sciences,
Condensed Matter Physics
Keywords:
Titanium-Tin Oxide; reactive sputtering; spectroscopic ellipsometry; electrochromic materials
Online: 4 May 2023 (12:59:09 CEST)
ARTICLE
|
doi:10.20944/preprints202310.1045.v1
Subject:
Chemistry And Materials Science,
Materials Science And Technology
Keywords:
Tantalum oxide; thin film; reactive sputtering; gas pulsing; metal; semi-conductor; dielectric; periodic multilayers.
Online: 17 October 2023 (09:23:03 CEST)
ARTICLE
|
doi:10.20944/preprints202312.1773.v1
Subject:
Chemistry And Materials Science,
Nanotechnology
Keywords:
Photoelectrochemistry; surface plasmon resonance; atomic layer deposition; magnetron sputtering; titanium oxide; Au nanoparticles; thin film; photoelectrode
Online: 25 December 2023 (11:26:09 CET)
ARTICLE
|
doi:10.20944/preprints202308.2162.v1
Subject:
Engineering,
Mechanical Engineering
Keywords:
Titanium Vanadium Nitride; Sputtering; Tribology; Friction; Wear
Online: 31 August 2023 (10:41:28 CEST)
ARTICLE
|
doi:10.20944/preprints202309.1408.v1
Subject:
Engineering,
Metallurgy And Metallurgical Engineering
Keywords:
Cu nanotwin; Cr adhesive layer; magnetron sputtering; substrate bias
Online: 21 September 2023 (04:58:01 CEST)
ARTICLE
|
doi:10.20944/preprints202309.1898.v1
Subject:
Engineering,
Industrial And Manufacturing Engineering
Keywords:
borides; carbides; films; magnetron sputtering; multi-chamber detonation device; microstructure; hardness; tribological property
Online: 28 September 2023 (04:25:49 CEST)
ARTICLE
|
doi:10.20944/preprints202404.0098.v1
Subject:
Engineering,
Metallurgy And Metallurgical Engineering
Keywords:
Si-C-N; Nanocomposite coatings; crystallization; sputtering; nanomechanical
Online: 1 April 2024 (15:03:28 CEST)
ARTICLE
|
doi:10.20944/preprints202404.1607.v1
Subject:
Mechanical Engineering,
Engineering
Keywords:
ion beam sputtering; laser damage; hydroxyl groups; surface hydroxylation; chemical structure defect
Online: 24 April 2024 (14:10:16 CEST)