Ismaeel, N.T.; Lábadi, Z.; Petrik, P.; Fried, M. Investigation of Electrochromic, Combinatorial TiO2-SnO2 Mixed Layers by Spectroscopic Ellipsometry Using Different Optical Models. Materials2023, 16, 4204.
Ismaeel, N.T.; Lábadi, Z.; Petrik, P.; Fried, M. Investigation of Electrochromic, Combinatorial TiO2-SnO2 Mixed Layers by Spectroscopic Ellipsometry Using Different Optical Models. Materials 2023, 16, 4204.
Ismaeel, N.T.; Lábadi, Z.; Petrik, P.; Fried, M. Investigation of Electrochromic, Combinatorial TiO2-SnO2 Mixed Layers by Spectroscopic Ellipsometry Using Different Optical Models. Materials2023, 16, 4204.
Ismaeel, N.T.; Lábadi, Z.; Petrik, P.; Fried, M. Investigation of Electrochromic, Combinatorial TiO2-SnO2 Mixed Layers by Spectroscopic Ellipsometry Using Different Optical Models. Materials 2023, 16, 4204.
Abstract
We determined the optimal composition of reactive magnetron sputtered TiO2-SnO2 mixed layers for electrochromic purposes. We determined and mapped the composition and optical parameters by Spectroscopic Ellipsometry (SE). The Ti‐ and Sn‐ targets have been placed separately, and the Si-wafers on glass substrate (30 cm× 30 cm) were moved under the two separated targets (Ti and Sn) in Ar‐O2 plasma. Different (Effective Medium Approximation (EMA) and oscillator-type) op-tical models were used to obtain the composition maps and thickness of the sample layer. Scanning Electron Microscopy (SEM) with Energy-Dispersive X-ray Spectroscopy (EDS) has been used to check the SE results. The ’goodness’ of diverse optical models have been compared, according to the conditions of sample preparation. We show that in the case of molecular-level mixed layers 2‐Tauc‐Lorentz oscillator model is better than the Bruggeman Effective Medium Approximation (BEMA). The electrochromic properties of mixed metal oxides that deposited by reactive sputtering have been mapped, too.
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