Preprint Article Version 1 Preserved in Portico This version is not peer-reviewed

High Sensitivity Sers Substrate of A Few Nanometers Single-Layer Silver Thickness Fabricated by DC Magnetron Sputtering Technology

Hsing-Yu Wu
ORCID logo ,
Hung-Chun Lin
,
Guan-Yi Hung
,
Chi-Shun Tu
,
Ting-Yu Liu
,
Chung-Hung Hong
ORCID logo ,
Guoyu Yu
,
Jin-Cherng Hsu
*
Version 1 : Received: 31 July 2022 / Approved: 2 August 2022 / Online: 2 August 2022 (04:23:31 CEST)

A peer-reviewed article of this Preprint also exists.

Wu, H.-Y.; Lin, H.-C.; Hung, G.-Y.; Tu, C.-S.; Liu, T.-Y.; Hong, C.-H.; Yu, G.; Hsu, J.-C. High Sensitivity SERS Substrate of a Few Nanometers Single-Layer Silver Thickness Fabricated by DC Magnetron Sputtering Technology. Nanomaterials 2022, 12, 2742. Wu, H.-Y.; Lin, H.-C.; Hung, G.-Y.; Tu, C.-S.; Liu, T.-Y.; Hong, C.-H.; Yu, G.; Hsu, J.-C. High Sensitivity SERS Substrate of a Few Nanometers Single-Layer Silver Thickness Fabricated by DC Magnetron Sputtering Technology. Nanomaterials 2022, 12, 2742.

Abstract

Surface-enhanced Raman spectroscopy (SERS) is commonly used for super-selective analysis through nanostructured silver layers in the environment, food quality, biomedicine, and materials science. To fabricate a high-sensitivity but more accessible device of SERS, dc magnetron sputtering technology was used to realize high sensitivity, low cost, stable deposition rate, and rapid mass production. This study investigated various thicknesses of a silver film ranging from 3.0 to 12.1 nm by field-emission-scanning-electron microscope, X-ray diffraction, and X-ray photoelectron spectroscopy. In the rhodamine 6G (R6G) testing irradiated by a He-Ne laser beam, the analytical enhancement factor (AEF) of 9.35x108, the limit of detection (LOD) of 10-8 M, and the relative standard deviation (RSD) of 1.61% were better than other SERS substrates fabricated by the same dc sputtering process because the results show that the 6 nm thickness silver layer has the highest sensitivity, stability, and lifetime. The paraquat and acetylcholine analytes were further investigated and high sensitivity was also achievable. The proposed SERS samples were evaluated and stored in a low humidity environment for up to forty weeks, and no spectrum attenuation could be detected. Soon, the proposed technology to fabricate high sensitivity, repeatability, and robust SERS substrate will be an optimized process technology in multiple applications.

Keywords

surface-enhanced Raman scattering (SERS); silver nanoparticle (AgNP); rhodamine 6G (R6G); dc magnetron sputtering; SERS substrate; hotspot; analytical enhancement factor (AEF); limit of detection (LOD); relative standard deviation (RSD)

Subject

Physical Sciences, Applied Physics

Copyright: This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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