Preprint Article Version 1 Preserved in Portico This version is not peer-reviewed

A Novel Method of Synthesizing Graphene for Electronic Device Applications

Nierlly Galvão
* ,
Getulio Vasconcelos
,
Rodrigo Pessoa
* ORCID logo ,
João Machado
,
Marciel Guerino
,
Mariana Fraga
,
Bruno Rodrigues
,
Julien Camus
,
Mohamed Djouadi
,
Homero Maciel
Version 1 : Received: 29 May 2018 / Approved: 30 May 2018 / Online: 30 May 2018 (08:22:05 CEST)

A peer-reviewed article of this Preprint also exists.

Galvão, N.; Vasconcelos, G.; Pessoa, R.; Machado, J.; Guerino, M.; Fraga, M.; Rodrigues, B.; Camus, J.; Djouadi, A.; Maciel, H. A Novel Method of Synthesizing Graphene for Electronic Device Applications. Materials 2018, 11, 1120. Galvão, N.; Vasconcelos, G.; Pessoa, R.; Machado, J.; Guerino, M.; Fraga, M.; Rodrigues, B.; Camus, J.; Djouadi, A.; Maciel, H. A Novel Method of Synthesizing Graphene for Electronic Device Applications. Materials 2018, 11, 1120.

Abstract

This article reports a novel and efficient method to synthesize graphene by thermal decomposition process. In this method, silicon carbide (SiC) thin films grown on Si(100) wafers with an AlN buffer layer were used as substrates. A CO2 laser beam heating without vacuum or controlled atmosphere was applied for SiC thermal decomposition. The physical, chemical, morphological, and electrical properties of the laser-produced graphene were investigated for different laser energy densities. The results demonstrate that graphene was produced in form of small islands with quality, density and properties depending on the applied laser energy density. Furthermore, the produced graphene exhibits a sheet resistance characteristic similar to graphene grown on mono-crystalline SiC wafer, which indicates its potential for electronic device applications.

Keywords

graphene synthesis; silicon carbide; thin film; high-power impulse magnetron sputtering; thermal decomposition, electronic devices

Subject

Chemistry and Materials Science, Surfaces, Coatings and Films

Copyright: This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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