Working Paper Article Version 1 This version is not peer-reviewed

Tuning of the Silicon Nitride Refractive Index by RF Sputtering Power

Version 1 : Received: 6 July 2021 / Approved: 7 July 2021 / Online: 7 July 2021 (12:05:33 CEST)

How to cite: De Luca, D.; Di Gennaro, E.; De Maio, D.; D'Alessandro, C.; Caldarelli, A.; Musto, M.; Koral, C.; Andreone, A.; Di Meo, V.; Iodice, M.; Russo, R. Tuning of the Silicon Nitride Refractive Index by RF Sputtering Power. Preprints 2021, 2021070179 De Luca, D.; Di Gennaro, E.; De Maio, D.; D'Alessandro, C.; Caldarelli, A.; Musto, M.; Koral, C.; Andreone, A.; Di Meo, V.; Iodice, M.; Russo, R. Tuning of the Silicon Nitride Refractive Index by RF Sputtering Power. Preprints 2021, 2021070179

Abstract

The fabrication of thin-film multilayer structures by sputtering technique usually requires multi-cathode deposition machine. This study proposes a simpler approach based on the RF power modulation: silicon nitride (SiN$_x$) thin films were prepared by RF reactive sputtering in (Ar + N$_2$) atmosphere at room temperature. The samples were analyzed to highlight the effects of different deposition conditions on the morphological and optical properties of the films in the visible and near/mid-IR regions. The refractive index of the films was changed in the range of 1.5 - 2.5 (at $\lambda$=800 nm) by tuning the sputtering power. IR reflectance measurements revealed the absence of spurious (oxygen- or hydrogen-based) phases, while atomic force and scanning electron microscopies confirmed the presence of flat and defect-free samples surfaces.

Keywords

Silicon nitride; RF sputtering; refractive index; FTIR; AFM; SEM

Comments (0)

We encourage comments and feedback from a broad range of readers. See criteria for comments and our diversity statement.

Leave a public comment
Send a private comment to the author(s)
Views 0
Downloads 0
Comments 0
Metrics 0


×
Alerts
Notify me about updates to this article or when a peer-reviewed version is published.
We use cookies on our website to ensure you get the best experience.
Read more about our cookies here.