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Optimization of Grayscale Lithography for the Fabrication of Flat Diffractive Infrared Lenses on Silicon Wafers

This version is not peer-reviewed.

Angelos Bouchouri^*,

Muhammad Nadeem Akram^*,

Per Alfred Øhlckers

,

Angelos Bouchouri^*,

Muhammad Nadeem Akram^*,

Per Alfred Øhlckers

,

This version is not peer-reviewed.

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