Submitted:
02 February 2025
Posted:
04 February 2025
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Abstract
Keywords:
1. Introduction
2. Structure and Fabrication Process of FOWLP
3. Theoretical Frameworks of Machine Learning and Deep Learning
3.1. Support Vector Regression (SVR)
3.2. Random Forest (RF)
3.3. Gradient Boosting Regression (GBR)
3.4. K-nearest Neighbors (KNN)
3.5. Kernel Ridge Regression (KRR)
3.6. Recurrent Neural Networks (RNN)
3.7. Gated Recurrent Unit (GRU)
3.8. Multilayer Perceptron (MLP)
3.9. Long Short-Term Memory (LSTM)
4. Finite Element Analysis (FEA) Model for FOWLP
5. Results and Discussion
5.1. Characterization of Process-Induced Warpage of FOWLP
5.2. Establishment of Training/Test and Validation Datasets
5.3. A Comparison of Prediction Results from Different Learning Models
5.4. An AI Prediction Platform with a Graphical User Interface (GUI)
6. Conclusions
Author Contributions
Funding
Data Availability Statement
Conflicts of Interest
References
- Waldrop, M.M. The chips are down for Moore’s law. Nature 2016, 530, 144–147. [Google Scholar] [CrossRef]
- Lau, J.H. Recent advances and trends in advanced packaging. IEEE Trans. Compon. Packag. Manuf. Technol. 2022, 12, 228–252. [Google Scholar] [CrossRef]
- Huang, Y.W.; Chiang, K.N. Study of shear locking effect on 3D solder joint reliability analysis. J. Mech. 2022, 38, 176–184. [Google Scholar] [CrossRef]
- Zhao, J.; Chen, Z.; Qin, F.; Yu, D. Thermo-mechanical reliability study of through glass vias in 3D interconnection. Micromachines 2022, 13, 1799. [Google Scholar] [CrossRef] [PubMed]
- Liu, W.W.; Weng, B.; Li, J.; Yeh, C.K. FCCSP IMC growth under reliability stress following automotive standards. J. Microelectron. Electron. Packag. 2019, 16, 21–27. [Google Scholar]
- Yu, C.F.; Huang, Y.W.; Ouyang, T.Y.; Cheng, S.F.; Chang, H.H.; Hsiao, C.C. Suppression strategy for process-induced warpage of novel fan-out wafer level packaging. Microelectron. Reliab. 2022, 136, 114683. [Google Scholar] [CrossRef]
- Chen, C.; Su, M.; Ma, R.; Zhou, Y.; Li, J.; Cao, L. Investigation of warpage for multi-die fan-out wafer-level packaging process. Materials 2022, 15, 1683. [Google Scholar] [CrossRef]
- Van Dijk, M.; Huber, S.; Stegmaier, A.; Walter, H.; Wittler, O.; Schneider-Ramelow, M. Experimental and simulative study of warpage behavior for fan-out wafer-level packaging. Microelectron. Reliab. 2022, 135, 114585. [Google Scholar] [CrossRef]
- Cheng, H.C.; Wu, Z.-D.; Liu, Y.C. Viscoelastic warpage modeling of fan-out wafer-level packaging during wafer-level mold cure process. IEEE Trans. Compon. Packag. Manuf. Technol. 2020, 10, 1240–1250. [Google Scholar] [CrossRef]
- Lin, P.Y.; Lee, S. Warpage modeling of ultra-thin packages based on chemical shrinkage and cure-dependent viscoelasticity of molded underfill. IEEE Trans. Device Mater. Reliab. 2020, 20, 67–73. [Google Scholar] [CrossRef]
- Kavitha S; Varuna S; Ramya R. A comparative analysis on linear regression and support vector regression. 2016 Online International Conference on Green Engineering and Technologies (IC-GET), Coimbatore, 2016, pp. 1-5.
- Law, R.C.; Cheang, R.; Tan, Y.W.; Azid, I.-A. Thermal performance prediction of QFN packages using artificial neural network (ANN). In Proceedings of the Thirty-First IEEE/CPMT International Electronics Manufacturing Technology Symposium, Petaling Jaya, Malaysia, 8–10 November 2006; pp. 50–54. [Google Scholar]
- Acharya, P.V.; Lokanathan, M.; Ouroua, A.; Hebner, R.; Strank, S.; Bahadur, V. Machine learning-based predictions of benefits of high thermal conductivity encapsulation materials for power electronics packaging. J. Electron. Packag. ASME Trans. 2021, 143, 041109. [Google Scholar] [CrossRef]
- Subbarayan, G.; Li, Y.; Mahajan, R.L. Reliability simulations for solder joints using stochastic finite element and artificial neural network models. J. Electron. Packag. 1996, 118, 148–156. [Google Scholar] [CrossRef]
- Yuan, C.; Fan, X.; Zhang, G. Solder joint reliability risk estimation by AI-assisted simulation framework with genetic algorithm to optimize the initial parameters for AI models. Materials 2021, 14, 4835. [Google Scholar] [CrossRef] [PubMed]
- Hsiao, H.Y.; Chiang, K.N. AI-assisted reliability life prediction model for wafer-level packaging using the random forest method. J. Mech. 2021, 37, 28–36. [Google Scholar] [CrossRef]
- Praveena, M.; Jaiganesh, V. A literature review on supervised machine learning algorithms and boosting process. Int. J. Comput. Appl. 2017, 169, 32–35. [Google Scholar] [CrossRef]
- Ghawi, R.; Pfeffer, J. Efficient hyperparameter tuning with grid search for text categorization using KNN approach with BM25 similarity. Open Comput. Sci. 2019, 9, 160–180. [Google Scholar] [CrossRef]
- Panigrahy, S.K.; Chiang, K.N. Study on an artificial intelligence-based kernel ridge regression algorithm for wafer-level package reliability prediction. In Proceedings of the IEEE 71st Electronic Components and Technology Conference (ECTC), San Diego, CA, USA, 1 June–4 July 2021; pp. 1435–1441. [Google Scholar]
- Yin, C.; Zhu, Y.; Fei, J.; He, X. A deep learning approach for intrusion detection using recurrent neural networks. IEEE Access 2017, 5, 21954–21961. [Google Scholar] [CrossRef]
- Chen, J.; Jing, H.; Yuan, C.; Liu, Q. Gated recurrent unit-based recurrent neural network for remaining useful life prediction of nonlinear deterioration process. Reliab. Eng. Syst. Saf. 2019, 185, 372–382. [Google Scholar] [CrossRef]
- Tang, J.; Deng, C.; Huang, G.-B. Extreme learning machine for multilayer perceptron. IEEE Trans. Neural Netw. Learn. Syst. 2016, 27, 809–821. [Google Scholar] [CrossRef]
- Tsiouris, K.M.; Pezoulas, V.C.; Zervakis, M.; Konitsiotis, S.; Koutsouris, D.D.; Fotiadis, D.I. A long short-term memory deep learning network for the prediction of epileptic seizures using EEG signals. Comput. Biol. Med. 2018, 99, 24–37. [Google Scholar] [CrossRef]
- Ghosh, S.; Ekbal, A.; Bhattacharyya, P. Natural language processing and sentiment analysis: Perspectives from computational intelligence. Comput. Intell. Appl. Text Sentiment Data Anal. 2023, 17–47. [Google Scholar]
- Panigrahy, S.K.; Tseng, Y.C.; Lai, B.R.; Chiang, K.N. An overview of AI-assisted design-on-simulation technology for reliability life prediction of advanced packaging. Materials 2021, 14, 5342. [Google Scholar] [CrossRef]
- Kuo, H.C.; Chang, C.Y.; Yuan, C.A.; Chiang, K.N. Wafer-level packaging solder joint reliability lifecycle prediction using SVR-based machine learning algorithm. J. Mech. 2023, 39, 183–190. [Google Scholar] [CrossRef]
- Cheng, H.C.; Ma, C.L.; Liu, Y.L. Development of ANN-based warpage prediction model for FCCSP via subdomain sampling and Taguchi hyperparameter optimization. Micromachines 2023, 14, 1325. [Google Scholar] [CrossRef] [PubMed]
- Cheng, H.C.; Tai, L.C.; Liu, Y.C. Theoretical and experimental investigation of warpage evolution of flip chip package during fabrication. Materials 2021, 14, 4816. [Google Scholar] [CrossRef]
- Cheng, H.C.; Wu, Z.D.; Liu, Y.C. Viscoelastic warpage modeling of fan-out wafer-level packaging during wafer-level mold cure process. IEEE Trans. Compon. Packag. Manuf. Technol. 2020, 10, 1240–1250. [Google Scholar] [CrossRef]
- Czyzewski, J.; Rybak, A.; Gaska, K.; Sekula, R.; Kapusta, C. Modelling of effective thermal conductivity of composites filled with core-shell fillers. Materials 2020, 13, 5480. [Google Scholar] [CrossRef]
- Cheng, H.C.; Li, R.S.; Lin, S.C. ; Chen,W.H.; Chiang, K.N. Macroscopic mechanical constitutive characterization of through-silicon- via-based 3-D integration. IEEE Trans. Compon. Packag. Manuf. Technol. 2016, 6, 432–446. [Google Scholar] [CrossRef]














| Material | Young’s modulus (GPa) | Poisson’s ratio | Coefficient of thermal expansion (CTE) |
|---|---|---|---|
| Si | 131 | 0.26 | 2.8 |
| PI | 3.3 | 0.3 | 52.5 |
| Cu | 120 | 0.4 | 17.5 |
| Glass carrier | 70.9 | 0.29 | 5 |
| i | τi | gi | i | τi | gi |
|---|---|---|---|---|---|
| 1 | 1.0×1019 | 2.33×10-14 | 11 | 1.0×109 | 0.1209 |
| 2 | 1.0×1018 | 2.33×10-14 | 12 | 1.0×108 | 0.09685 |
| 3 | 1.0×1017 | 2.33×10-14 | 13 | 1.0×107 | 0.07191 |
| 4 | 1.0×1016 | 2.33×10-14 | 14 | 1.0×106 | 0.06336 |
| 5 | 1.0×1015 | 2.33×10-14 | 15 | 1.0×105 | 0.05796 |
| 6 | 1.0×1014 | 2.40×10-14 | 16 | 1.0×104 | 0.0473 |
| 7 | 1.0×1013 | 1.86×10-12 | 17 | 1.0×103 | 0.03086 |
| 8 | 1.0×1012 | 0.01558 | 18 | 1.0×102 | 0.04494 |
| 9 | 1.0×1011 | 0.109 | 19 | 1.0×101 | 0.01368 |
| 10 | 1.0×1010 | 0.1342 | 20 | 1.0×100 | 0.07303 |
| Young’s Modulus (GPa) |
Poisson’s Ratio | Shear Modulus (GPa) |
CTE (ppm/oC) |
||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Mat. | Cu content | ||||||||||||
| RDL4 | 23.5% | 3.93×10-10 | 3.93×10-10 | 25.85 | 0.12 | 1.79×10-12 | 1.79×10-12 | 4×10-11 | 9.64 | 9.64 | 5.87 | 5.87 | 0.17 |
| RDL3 | 40.2% | 14.0 | 14.0 | 46.9 | 0.32 | 0.096 | 0.096 | 5.72 | 17.54 | 17.54 | 36.11 | 36.11 | 18.81 |
| RDL2 | 35.7% | 12.8 | 12.8 | 42.2 | 0.32 | 0.097 | 0.097 | 5.31 | 15.77 | 15.77 | 37.93 | 37.93 | 19.16 |
| RDL1 | 24.9% | 10.5 | 10.5 | 30.8 | 0.316 | 0.108 | 0.108 | 4.39 | 11.52 | 11.52 | 41.81 | 41.81 | 20.48 |
| Feature Name | Level |
|---|---|
| Die/Package (%) | 10, 15, 20, 25, 30, 35, 40, 45, 48, 50, 55, 60 |
| Die thickness (μm) | 101.6, 152.4, 180.3, 203.2, 279.4 |
| EMC thickness (μm) | 256.6, 307.4, 335.3, 358.2, 434.4 |
| EMC Young’s modulus (GPa) | 5, 10, 15, 20, 25 |
| EMC CTE (ppm) | 5, 7, 10, 15 |
| Design | Die/PKG (%) |
Die thickness (μm) |
Mold thickness (μm) |
Mold E (GPa) |
Mold CTE (CTE) |
Warpage FEM (μm) |
SVR | RF | GBR | KNN | KRR |
| 1 | 10 | 203.2 | 358.2 | 25 | 5 | 570.6 | 493.1 | 557.6 | 526.1 | 937.9 | 707.0 |
| 2 | 15 | 180.3 | 335.3 | 15 | 5 | 266.6 | 214.2 | 251.8 | 272.6 | 276.9 | 332.23 |
| 3 | 20 | 152.4 | 307.4 | 20 | 15 | 4702.1 | 4762.0 | 4720.5 | 4863.1 | 4713.6 | 4958.4 |
| 4 | 25 | 101.6 | 256.6 | 10 | 7 | 560.6 | 516.1 | 476.8 | 403.4 | 563.7 | 472.8 |
| 5 | 30 | 101.6 | 256.6 | 25 | 15 | 4550.6 | 4473.3 | 4491.5 | 4678.4 | 4556.0 | 4331.5 |
| 6 | 35 | 152.4 | 307.4 | 5 | 15 | 698.9 | 573.0 | 711.6 | 685.8 | 607.5 | 669.3 |
| 7 | 48 | 152.4 | 307.4 | 10 | 15 | 906.9 | 805.8 | 894.6 | 924.9 | 1210.6 | 743.7 |
| 8 | 50 | 180.3 | 335.3 | 10 | 10 | 101.5 | 209.7 | 115.1 | 363.5 | 148.0 | 226.7 |
| 9 | 55 | 101.6 | 256.6 | 10 | 7 | 215.8 | 180.7 | 246.7 | 451.0 | 213.8 | 278.1 |
| 10 | 60 | 203.2 | 358.2 | 15 | 10 | 271.8 | 218.1 | 280.3 | 334.2 | 172.7 | 281.0 |
| Design | Die/PKG (%) |
Die thickness (μm) |
Mold thickness (μm) |
Mold E (GPa) |
Mold CTE (CTE) |
Warpage FEM (μm) |
RNN | GRU | MLPs | LSTM |
| 1 | 10 | 203.2 | 358.2 | 25 | 5 | 570.6 | 571.3 | 568.0 | 572.4 | 568.3 |
| 2 | 15 | 180.3 | 335.3 | 15 | 5 | 266.6 | 266.7 | 263.1 | 266.4 | 269.7 |
| 3 | 20 | 152.4 | 307.4 | 20 | 15 | 4702.1 | 4703.0 | 4700.3 | 4711.1 | 4698.4 |
| 4 | 25 | 101.6 | 256.6 | 10 | 7 | 560.6 | 558.5 | 556.7 | 557.8 | 557.0 |
| 5 | 30 | 101.6 | 256.6 | 25 | 15 | 4550.6 | 4551.5 | 4546.7 | 4558.8 | 4546.1 |
| 6 | 35 | 152.4 | 307.4 | 5 | 15 | 698.9 | 699.3 | 698.9 | 696.4 | 697.5 |
| 7 | 48 | 152.4 | 307.4 | 10 | 15 | 906.9 | 906.3 | 905.8 | 906.5 | 906.1 |
| 8 | 50 | 180.3 | 335.3 | 10 | 10 | 101.5 | 100.8 | 100.6 | 99.6 | 101.5 |
| 9 | 55 | 101.6 | 256.6 | 10 | 7 | 215.8 | 216.3 | 219.2 | 212.1 | 215.3 |
| 10 | 60 | 203.2 | 358.2 | 15 | 10 | 271.8 | 273.0 | 271.0 | 270.0 | 273.2 |
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