Submitted:
01 July 2024
Posted:
02 July 2024
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Abstract
Keywords:
1. Introduction
2. Materials and Methods
3. Results
3.1. Scaling-Up
3.2. Field Positioning and Testing
4. Discussion
5. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Acknowledgments
Conflicts of Interest
References
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| Sample | Thickness (nm) | WCA (°) |
|---|---|---|
| S1 | 780±90 | 93±3 |
| S2 | 1586±40 | 84.2±1.2 |
| S3 | 1628±5 | 89±4 |
| S4 | 1640±7 | 85±2 |
| S5 | 1648±8 | 86±3 |
| S_AlN | SB | N_AlN | NB |
|---|---|---|---|
| 92.99±0.12 | 95.57±0.07% | 93.38±0.19 | 95.24±0.08% |
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