Submitted:
22 April 2024
Posted:
23 April 2024
You are already at the latest version
Abstract
Keywords:
1. Introduction
2. FSM Control System
2.1. Dynamic Characteristics of Piezoelectric (PZT) Actuator
2.1. Tip-Tilt Controller of FSM Control System
3. Disturbance-Rejection Control Algorithm for FSM System
3.1. IMP-Based Controller
3.2. IMP-Based Controller with DOB
4. Experimental Results of DOB-Based FSM Control System
4. Conclusions
Acknowledgments:
Conflicts of Interest
References
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| Specification | Value |
|---|---|
| Resonance frequency | 450.2 Hz |
| 5 Hz sensitivity | 168.3 µrad /V |
| Gain of voltage amplifier | 10 V/V |
| Gain of sensor amplifier | 0.0059 V/ µrad |
| Specification | PI controller |
IMP (60 Hz) |
IMP (65 Hz) |
IMP (71 Hz) |
IMP (60/65 Hz) |
IMP (60/71 Hz) |
|
|---|---|---|---|---|---|---|---|
| Only IMP |
Control error (μrad rms) |
7.97 | 7.43 | 7.17 | 6.05 | 6.00 | 5.41 |
| Specification | PI controller |
IMP (60 Hz) |
IMP (65 Hz) |
IMP (71 Hz) |
IMP (60/65 Hz) |
IMP (60/71 Hz) |
|
|---|---|---|---|---|---|---|---|
| Only IMP |
Control error (μrad rms) |
7.97 | 7.43 | 7.17 | 6.05 | 6.00 | 5.41 |
|
Q20 filter (15 Hz) |
6.96 | 6.75 | 5.73 | 5.51 | 5.21 | ||
|
Q20 filter (30 Hz) |
6.76 | 6.57 | 5.51 | 5.57 | 5.06 | ||
|
Q30 filter (15 Hz) |
6.49 | 6.28 | 5.36 | 5.04 | 4.82 | ||
|
Q30 filter (30 Hz) |
6.18 | 6.05 | 5.24 | 5.12 | 4.84 | ||
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