Plasma-Chemical Disposal of Silicon and Germanium Tetrachlorides Waste by Hydrogen Reduction

Roman Kornev; Igor Gornushkin; Lubov Shabarova; Alena Kadomtseva; Georgiy Mochalov; Nikita Rekunov; Sergey Romanov; Vitaly Medov; Darya Belousova; Nikita Maleev

doi:10.20944/preprints202311.0611.v1

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preprints.org > chemistry and materials science > chemical engineering > doi: 10.20944/preprints202311.0611.v1

Preprint Article Version 1 Preserved in Portico This version is not peer-reviewed

Plasma-Chemical Disposal of Silicon and Germanium Tetrachlorides Waste by Hydrogen Reduction

^* ,

Version 1 : Received: 9 November 2023 / Approved: 9 November 2023 / Online: 9 November 2023 (11:20:32 CET)

A peer-reviewed article of this Preprint also exists.

Kornev, R.; Gornushkin, I.; Shabarova, L.; Kadomtseva, A.; Mochalov, G.; Rekunov, N.; Romanov, S.; Medov, V.; Belousova, D.; Maleev, N. Plasma-Chemical Disposal of Silicon and Germanium Tetrachlorides Waste by Hydrogen Reduction. Sci 2024, 6, 1. Kornev, R.; Gornushkin, I.; Shabarova, L.; Kadomtseva, A.; Mochalov, G.; Rekunov, N.; Romanov, S.; Medov, V.; Belousova, D.; Maleev, N. Plasma-Chemical Disposal of Silicon and Germanium Tetrachlorides Waste by Hydrogen Reduction. Sci 2024, 6, 1.

Abstract

The processes of hydrogen reduction of silicon and germanium chlorides under the conditions of high-frequency (40.68 MHz) counteracted arc discharge stabilized between two rod electrodes are investigated. The main gas-phase and solid products of plasma-chemical transformations are determined. Thermodynamic analysis of SiCl4 + H2 and GeCl4 + H2 systems for optimal process parameters was carried out. Using the example of hydrogen reduction of SiCl4 by the method of numerical modeling, gas-dynamic and thermal processes for this type of discharge are investigated. The impurity composition of gas-phase and solid reaction products is investigated. The possibility of single-stage production of high-purity Si and Ge mainly in the form of compact ingots, as well as high-purity chlorosilanes and trichlorogermane, is shown.

Keywords

high-frequency arc discharge; hydrogen reduction; silicon chlorides; germanium chlorides

Subject

Chemistry and Materials Science, Chemical Engineering

Copyright: This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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