PreprintArticleVersion 1Preserved in Portico This version is not peer-reviewed
Influence of Pvd Deposition Mode on the Quality and Integrity of CrAlN Thin Films: A Study of Magnetron Sputtering Processes on Stationary and Rotating Substrates
Version 1
: Received: 7 July 2023 / Approved: 10 July 2023 / Online: 10 July 2023 (07:15:41 CEST)
How to cite:
TLILI, B.; NASSER, M.; GUIZENI, H.; MONTAGNE, A. Influence of Pvd Deposition Mode on the Quality and Integrity of CrAlN Thin Films: A Study of Magnetron Sputtering Processes on Stationary and Rotating Substrates. Preprints2023, 2023070562. https://doi.org/10.20944/preprints202307.0562.v1
TLILI, B.; NASSER, M.; GUIZENI, H.; MONTAGNE, A. Influence of Pvd Deposition Mode on the Quality and Integrity of CrAlN Thin Films: A Study of Magnetron Sputtering Processes on Stationary and Rotating Substrates. Preprints 2023, 2023070562. https://doi.org/10.20944/preprints202307.0562.v1
TLILI, B.; NASSER, M.; GUIZENI, H.; MONTAGNE, A. Influence of Pvd Deposition Mode on the Quality and Integrity of CrAlN Thin Films: A Study of Magnetron Sputtering Processes on Stationary and Rotating Substrates. Preprints2023, 2023070562. https://doi.org/10.20944/preprints202307.0562.v1
APA Style
TLILI, B., NASSER, M., GUIZENI, H., & MONTAGNE, A. (2023). Influence of Pvd Deposition Mode on the Quality and Integrity of CrAlN Thin Films: A Study of Magnetron Sputtering Processes on Stationary and Rotating Substrates. Preprints. https://doi.org/10.20944/preprints202307.0562.v1
Chicago/Turabian Style
TLILI, B., Hichem GUIZENI and Alex MONTAGNE. 2023 "Influence of Pvd Deposition Mode on the Quality and Integrity of CrAlN Thin Films: A Study of Magnetron Sputtering Processes on Stationary and Rotating Substrates" Preprints. https://doi.org/10.20944/preprints202307.0562.v1
Abstract
The development and qualification of CrAlN coatings deposited by DC magnetron sputtering offer new industrial solutions to increase the lifecycle of material forming tools (machining and shaping). This study focuses on the selection and optimization of deposition modes for CrAlN layers to be deposited on a 90CrMoV8 tool steel substrate. The adopted methodology aims to optimize the deposition conditions to meet the customer's requirement of a CrAlN coating thickness of approximately 2-3 µm for use in a hot forming process. Different polarizations using two Al and Cr targets, with both stationary and rotating substrate modes during deposition, were tested and evaluated. Characterizations of the CrAlN coating layers (microhardness, residual stress, structures) and performance in service (wear, friction, adhesion, corrosion) were chosen as selection criteria for a particular coating mode. The aluminum content plays a crucial role in the tribological and mechanical behavior of CrAlN layers. Corrosion resistance is more sensitive to the aluminum content for the stationary deposition mode. As a result, the rotating mode provides higher adhesion (+100%) and less wear (-60%) compared to the stationary mode. Therefore, depending on the likely performance in service, either a stationary or rotating mode could be applied for coating the functional surfaces of hot forming tools.
Keywords
CrAlN; corrosion; friction; microstructure; bias voltage
Subject
Engineering, Metallurgy and Metallurgical Engineering
Copyright:
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
