@article{202307.0562,
	doi = {10.20944/preprints202307.0562.v1},
	url = {https://doi.org/10.20944/preprints202307.0562.v1},
	year = 2023,
	month = {July},
	publisher = {Preprints},
	author = {Brahim TLILI and Mohamed NASSER and Hichem GUIZENI and Alex MONTAGNE},
	title = {Influence of Pvd Deposition Mode on the Quality and Integrity of CrAlN Thin Films: A Study of Magnetron Sputtering Processes on Stationary and Rotating Substrates},
	journal = {Preprints}
}