TY  - GENERIC
DO  - 10.20944/preprints202307.0562.v1
UR  - http://dx.doi.org/10.20944/preprints202307.0562.v1
TI  - Influence of Pvd Deposition Mode on the Quality and Integrity of CrAlN Thin Films: A Study of Magnetron Sputtering Processes on Stationary and Rotating Substrates
T2  - Preprints
AU  - TLILI, Brahim
AU  - NASSER, Mohamed
AU  - GUIZENI, Hichem
AU  - MONTAGNE, Alex
PY  - 2023
DA  - 2023/07/10
PB  - Preprints