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Impact of Residual Stress on a Polysilicon Channel in Scaled 3D NAND Flash Memory

This version is not peer-reviewed.

Juyoung Lee,Dong-Gwan Yoon,

,

Yun-Heub Song^*

Juyoung Lee,Dong-Gwan Yoon,

,

Yun-Heub Song^*

This version is not peer-reviewed.

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