Preprint Article Version 1 Preserved in Portico This version is not peer-reviewed

Sensor for the Characterization of 2D Angular Actuators with Picoradian Resolution and Nanoradian Accuracy on the Microradian Range

Version 1 : Received: 17 October 2020 / Approved: 19 October 2020 / Online: 19 October 2020 (16:24:13 CEST)

How to cite: Pisani, M.; Astrua, M.; Thirumalai, S. Sensor for the Characterization of 2D Angular Actuators with Picoradian Resolution and Nanoradian Accuracy on the Microradian Range. Preprints 2020, 2020100401 (doi: 10.20944/preprints202010.0401.v1). Pisani, M.; Astrua, M.; Thirumalai, S. Sensor for the Characterization of 2D Angular Actuators with Picoradian Resolution and Nanoradian Accuracy on the Microradian Range. Preprints 2020, 2020100401 (doi: 10.20944/preprints202010.0401.v1).

Abstract

High precision angular actuators are used for high demanding applications such as laser steering for photolithography. Piezo technology allows developing actuators with such a high resolution that the characterization of the same is out of the capabilities of commercially available instruments. At INRIM we have designed and built a device to the purpose of characterizing precision 2D angular actuators with a resolution surpassing the best devices on the market. The device is based on a multi reflection scheme that allows multiplying the deflection angle by a factor of 70. The ultimate resolution of the device is 2 prad/√Hz over a measurement range of 36 µrad with a measurement band > 10 kHz. The working principle, the practical realization and the case study on a top-level commercial angular actuator (Nano-MTA2 produced by MadCityLabs) are described.

Subject Areas

Angular actuators; angular sensors; encoders; autocollimators

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