Submitted:
17 October 2020
Posted:
19 October 2020
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Abstract
High precision angular actuators are used for high demanding applications such as laser steering for photolithography. Piezo technology allows developing actuators with such a high resolution that the characterization of the same is out of the capabilities of commercially available instruments. At INRIM we have designed and built a device to the purpose of characterizing precision 2D angular actuators with a resolution surpassing the best devices on the market. The device is based on a multi reflection scheme that allows multiplying the deflection angle by a factor of 70. The ultimate resolution of the device is 2 prad/√Hz over a measurement range of 36 µrad with a measurement band > 10 kHz. The working principle, the practical realization and the case study on a top-level commercial angular actuator (Nano-MTA2 produced by MadCityLabs) are described.
Keywords:
Angular actuators
; angular sensors
; encoders
; autocollimators
Copyright: This open access article is published under a Creative Commons CC BY 4.0 license, which permit the free download, distribution, and reuse, provided that the author and preprint are cited in any reuse.
