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Application-Specific Oxide-Based and Metal-Dielectric Thin Film Materials Prepared by RF Magnetron Sputtering

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Submitted:

16 August 2019

Posted:

17 August 2019

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Abstract
We report on the development of several different thin-film functional material systems prepared by RF magnetron sputtering at Edith Cowan University nanofabrication labs. We conduct research on the design, prototyping, and practical fabrication of high-performance magneto-optic (MO) materials, oxide based sensor components, and heat regulation coatings for advanced construction and solar windows.
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Subject: Physical Sciences  -   Applied Physics
Copyright: This open access article is published under a Creative Commons CC BY 4.0 license, which permit the free download, distribution, and reuse, provided that the author and preprint are cited in any reuse.
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