Submitted:
03 October 2017
Posted:
03 October 2017
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Abstract
Various factors and constraints should be considered when developing a manufacturing production schedule, and such a schedule is often based on rules. This paper develops a composite dispatching rule based on heuristic rules that comprehensively consider various factors in a semiconductor production line. The composite rule is obtained by exploring various states of a semiconductor production line (machine status, queue size, etc.), where such indicators as makespan and equipment efficiency are used to judge performance. A model of the response surface, as a function of key variables, is then developed to find the optimized parameters of a composite rule for various production states. Further, dynamic scheduling of semiconductor manufacturing is studied based on support vector regression (SVR). This approach dynamically obtains a composite dispatching rule (i.e. parameters of the composite dispatching rule) that can be used to optimize production performance according to real-time production line state. Following optimization, the proposed dynamic scheduling approach is tested in a real semiconductor production line to validate the effectiveness of the proposed composite rule set.
Keywords:
Dynamic Scheduling
; Semiconductor Manufacturing
; Composite Rule Set
; Support Vector Regression (SVR)
Copyright: This open access article is published under a Creative Commons CC BY 4.0 license, which permit the free download, distribution, and reuse, provided that the author and preprint are cited in any reuse.
