Equilibrium Model of Movable Elements of Micromechanical Devices with Internal Suspensions

Olga Ezhova; Igor Lysenko; Boris Konoplev; Filipp Bondarev

doi:10.20944/preprints201607.0080.v1

Preprint Technical Note Version 1 Preserved in Portico This version is not peer-reviewed

Version 1 : Received: 26 July 2016 / Approved: 26 July 2016 / Online: 26 July 2016 (16:06:33 CEST)

In this work model of mirror elements equilibrium of the micromechanical components is developed, the behavior analysis of the mirror element of micromechanical mirrors in case changing of control voltages of electrostatic actuators is carried out, an expression for determining the maximum value of deflection voltage at which the snap-down effect will take the following form is obtained in case of the influence of the coefficient of the electrostatic rigidity of electrostatic actuators. The developed equilibrium model of mirror elements and the obtained results of modeling can be used at design of micromechanical mirrors with internal suspensions.

micromechanical mirrors, equilibrium model, electrostatic actuators, criteria, coefficient.

Engineering, Control and Systems Engineering

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Equilibrium Model of Movable Elements of Micromechanical Devices with Internal Suspensions

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