TY - GENERIC DO - 10.20944/preprints201607.0080.v1 UR - http://dx.doi.org/10.20944/preprints201607.0080.v1 TI - Equilibrium Model of Movable Elements of Micromechanical Devices with Internal Suspensions T2 - Preprints AU - Ezhova, Olga AU - Lysenko, Igor AU - Konoplev, Boris AU - Bondarev, Filipp PY - 2016 DA - 2016/07/26 PB - Preprints