@article{201607.0080, doi = {10.20944/preprints201607.0080.v1}, url = {https://doi.org/10.20944/preprints201607.0080.v1}, year = 2016, month = {July}, publisher = {Preprints}, author = {Olga Ezhova and Igor Lysenko and Boris Konoplev and Filipp Bondarev}, title = {Equilibrium Model of Movable Elements of Micromechanical Devices with Internal Suspensions}, journal = {Preprints} }