ARTICLE
|
doi:10.20944/preprints202312.1406.v1
Subject:
Engineering,
Electrical And Electronic Engineering
Keywords:
MEMS; electrostatic actuator; scanning mirror; dynamical control
Online: 19 December 2023 (09:03:29 CET)
ARTICLE
|
doi:10.20944/preprints202312.1459.v1
Subject:
Engineering,
Electrical And Electronic Engineering
Keywords:
MEMS; electrostatic force; comb driver; stability; larger displacement; high performance
Online: 19 December 2023 (12:06:28 CET)