Sun, H.; Liu, Y.; Lin, Y.-S. Improvement and Investigation of Electrostatic Comb Actuator Performance. Preprints2023, 2023121459. https://doi.org/10.20944/preprints202312.1459.v1
APA Style
Sun, H., Liu, Y., & Lin, Y. S. (2023). Improvement and Investigation of Electrostatic Comb Actuator Performance. Preprints. https://doi.org/10.20944/preprints202312.1459.v1
Chicago/Turabian Style
Sun, H., Yuxin Liu and Yu-Sheng Lin. 2023 "Improvement and Investigation of Electrostatic Comb Actuator Performance" Preprints. https://doi.org/10.20944/preprints202312.1459.v1
Abstract
We present a design of electrostatic comb driver to improve and investigate its actuation performance. The proposed electrostatic comb actuator (ECA) is composed of two set of interdigitated comb microstructures, the inner combs are fixed to form the fish-bone microstructures and the outer combs are movable and connected to crab-leg flexure beams microstructures. The ECA is investigated to optimize the actuation performance by changing the comb shape and the intersection angle of crab-leg flexure beams. The comb shapes are compared between the traditional rectangle shape and the trapezoid shape, while the intersection angles of crab-leg flexure beams are compared between 45°, 60°, and 90° on the influences of ECA displacement and stability characteristics. These parameters are investigated for their impacts on the dynamic comb displacement and driving voltage. Under the condition of a driving DC bias voltage of 100 volts, the ECA displacement is firstly increased and then gradually decreased by increasing the comb finger length. The maximum displacement of ECA with trapezoid comb is 47.2 μm while that of ECA with rectangle comb is 22.4 μm. By using trapezoid comb shape to replace the rectangle comb under the same conditions, the ECA displacement is improved 2-fold. To enhance the stability of ECA system, the intersection angle of 90˚ of crab-leg flexure beams shows highest stability that is great better than the intersection angle of 45° and 60° of crab-leg flexure beams by increasing the driving different DC bias voltage to 100 volts on ECA. The stability of the ECA with the intersection angle of 90° of crab-leg flexure beams is enhanced 1.1-fold and 1.4-fold compared to that of 45° and 60° of crab-leg flexure beams, respectively. This design provides an optimized approach to the electrostatic comb actuator that can be used expansively in the gyroscope, motion sensor, position sensor, imaging sensor, optical sensor, and so on.
Keywords
MEMS; electrostatic force; comb driver; stability; larger displacement; high performance
Subject
Engineering, Electrical and Electronic Engineering
Copyright:
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
