This article presents a new design of supporting tethers through the concept of force distribution. The transmitted force applied on tethers will be distributed on the new tether design area resulting in low acoustic energy transferred to anchor boundaries and stored energy enhancement. This technique achieves an anchor quality factor of 175,000 compared to 58,000 obtained from con-ventional tether design representing 3-fold enhancement. Also, the unloaded quality factor of the proposed design improved from 23,750 to 27,442 representing 1.2-fold improvements.

: This paper proposes a reem-shape phononic crystal for the performance enhancement of TPoS resonators. The proposed phononic crystal offers an ultra-wide acoustic band gap that prevents energy leakage through the supporting substrate on its placement at the anchoring boundary, resulting in significant improvements in the resonator quality factor. Simulated results show reem-shape Phononic crystals generate a band gap up to 175MHz with BG of 90% and enhance the anchor quality factor from 180,000 to 6,000,000 and unloaded quality factor from 133,000 to 160,000 representing 33.3-fold and 1.2-fold improvements respectively.

This paper proposes a radial alternating materials phononic crystal (RAM-PnC). By simulating the band gap structure of the phononic crystal, it is verified that there is a complete acoustic band gap at the resonant frequency of 175.14 MHz, which can prevent the propagation of elastic waves in a specific direction. The proposed alternately arranged radial phononic crystal structure is applied to the thin-film piezoelectric-on-silicon (TPOPS) MEMS resonator. The finite element simulation method increases the anchor quality factor (Qanchor) from 60596 to 659536011 at the operating frequency of 175.14 MHz, which is about 10,000 times higher. The motion resistance of the RAM-PnC resonator is reduced from 156.25 Ω to 48.31 Ω compared with the traditional resonator. At the same time, the insertion loss of the RAM-PnC resonator is reduced by 1.1 dB compared with the traditional resonator.