Awad, M.; Workie, T.B.; Bao, J.; Hashimoto, K.-Y. Nonconventional Tether Structure for Quality Factor Enhancement of Thin-Film-Piezoelectric-on-Si MEMS Resonator. Micromachines2023, 14, 1965.
Awad, M.; Workie, T.B.; Bao, J.; Hashimoto, K.-Y. Nonconventional Tether Structure for Quality Factor Enhancement of Thin-Film-Piezoelectric-on-Si MEMS Resonator. Micromachines 2023, 14, 1965.
Awad, M.; Workie, T.B.; Bao, J.; Hashimoto, K.-Y. Nonconventional Tether Structure for Quality Factor Enhancement of Thin-Film-Piezoelectric-on-Si MEMS Resonator. Micromachines2023, 14, 1965.
Awad, M.; Workie, T.B.; Bao, J.; Hashimoto, K.-Y. Nonconventional Tether Structure for Quality Factor Enhancement of Thin-Film-Piezoelectric-on-Si MEMS Resonator. Micromachines 2023, 14, 1965.
Abstract
This article presents a new design of supporting tethers through the concept of force distribution. The transmitted force applied on tethers will be distributed on the new tether design area resulting in low acoustic energy transferred to anchor boundaries and stored energy enhancement. This technique achieves an anchor quality factor of 175,000 compared to 58,000 obtained from con-ventional tether design representing 3-fold enhancement. Also, the unloaded quality factor of the proposed design improved from 23,750 to 27,442 representing 1.2-fold improvements.
Keywords
MEMS; TPoS; anchor loss; quality factor; tether
Subject
Engineering, Electrical and Electronic Engineering
Copyright:
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
