Reem-Shape Phononic Crystal for Q anchor enhancement of TPoS MEMS Resonator

Mohammed Awad; Temesgen Bailie Workie; Jing-Fu Bao; Ken-ya Hashimoto

doi:10.20944/preprints202306.1871.v1

Preprint Article Version 1 Preserved in Portico This version is not peer-reviewed

Version 1 : Received: 26 June 2023 / Approved: 27 June 2023 / Online: 27 June 2023 (10:37:44 CEST)

: This paper proposes a reem-shape phononic crystal for the performance enhancement of TPoS resonators. The proposed phononic crystal offers an ultra-wide acoustic band gap that prevents energy leakage through the supporting substrate on its placement at the anchoring boundary, resulting in significant improvements in the resonator quality factor. Simulated results show reem-shape Phononic crystals generate a band gap up to 175MHz with BG of 90% and enhance the anchor quality factor from 180,000 to 6,000,000 and unloaded quality factor from 133,000 to 160,000 representing 33.3-fold and 1.2-fold improvements respectively.

MEMS Resonators; TPoS; phononic crystals; Quality factor; Anchor loss

Engineering, Electrical and Electronic Engineering

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Reem-Shape Phononic Crystal for Q anchor enhancement of TPoS MEMS Resonator

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