ARTICLE
|
doi:10.20944/preprints202409.1046.v1
Subject:
Computer Science And Mathematics,
Other
Keywords:
Overlay Modeling; Photolithography; Parameters Tuning; EUV lithography; Semiconductor Manufacturing; Yield Results
Online: 13 September 2024 (08:24:36 CEST)
ARTICLE
|
doi:10.20944/preprints202403.0471.v1
Subject:
Physical Sciences,
Optics And Photonics
Keywords:
Infrared microscopy; axial resolution; binary axicon; photolithography; femtosecond ablation; chemical imaging
Online: 8 March 2024 (09:04:24 CET)
ARTICLE
|
doi:10.20944/preprints202011.0176.v1
Subject:
Physical Sciences,
Acoustics
Keywords:
lithium niobate microring resonator; silicon nitride waveguide; photolithography assisted chemo-mechanical etching
Online: 4 November 2020 (08:45:06 CET)
ARTICLE
|
doi:10.20944/preprints202211.0281.v1
Subject:
Physical Sciences,
Optics And Photonics
Keywords:
diffractive lens; imaging; Lucy-Richardson-Rosen algorithm; holography; incoherent imaging; telescope; photolithography; computational imaging
Online: 15 November 2022 (07:52:16 CET)
ARTICLE
|
doi:10.20944/preprints202306.1820.v1
Subject:
Engineering,
Industrial And Manufacturing Engineering
Keywords:
Photolithography; Optimal Design of Experiments; Optimal Experimental Design; D-optimal; G-Optimal; A-Optimal; Control Algorithm; Optimization; Genetic Algorithms; Compound Criteria
Online: 26 June 2023 (14:02:17 CEST)