Preprint Article Version 1 Preserved in Portico This version is not peer-reviewed

An Ultra-high-Q lithium Niobate Microresonator Integrated with a Silicon Nitride Waveguide in the Vertical Configuration for Evanescent Light Coupling

Jianhao Zhang
,
Rongbo Wu
,
Min Wang
* ORCID logo ,
Youting Liang
,
Junxia Zhou
,
Miao Wu
,
Zhiwei Fang
,
Wei Chu
ORCID logo ,
Ya Cheng
* ORCID logo
Version 1 : Received: 3 November 2020 / Approved: 4 November 2020 / Online: 4 November 2020 (08:45:06 CET)

A peer-reviewed article of this Preprint also exists.

Zhang, J.; Wu, R.; Wang, M.; Liang, Y.; Zhou, J.; Wu, M.; Fang, Z.; Chu, W.; Cheng, Y. An Ultra-High-Q Lithium Niobate Microresonator Integrated with a Silicon Nitride Waveguide in the Vertical Configuration for Evanescent Light Coupling. Micromachines 2021, 12, 235. Zhang, J.; Wu, R.; Wang, M.; Liang, Y.; Zhou, J.; Wu, M.; Fang, Z.; Chu, W.; Cheng, Y. An Ultra-High-Q Lithium Niobate Microresonator Integrated with a Silicon Nitride Waveguide in the Vertical Configuration for Evanescent Light Coupling. Micromachines 2021, 12, 235.

Abstract

We demonstrate hybrid integration of a lithium niobate microring resonator with a silicon nitride waveguide in the vertical configuration to achieve efficient light coupling. The microring resonator is fabricated on a lithium niobate on insulator (LNOI) substrate using photolithography assisted chemo-mechanical etching (PLACE). A fused silica cladding layer is deposited on the LNOI ring resonator. The silicon nitride waveguide is further produced on the fused silica cladding layer by first fabricating a trench in the fused silica using focused ion beam (FIB) etching for facilitating the evanescent coupling, followed by formation of the silicon nitride waveguide on the bottom of the trench. The FIB etching ensures the required high positioning accuracy between the waveguide and the ring resonator. We achieve Q-factors as high as 1.4*10^7 with the vertically integrated device.

Keywords

lithium niobate microring resonator; silicon nitride waveguide; photolithography assisted chemo-mechanical etching

Subject

Physical Sciences, Acoustics

Copyright: This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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