Version 1
: Received: 24 November 2023 / Approved: 24 November 2023 / Online: 27 November 2023 (10:24:55 CET)
How to cite:
Bhattacharyya, A.S. Effect of Cracks at Shallow Depths during Nanoindentation in Titanium Diboride Hard Coatings. Preprints2023, 2023111625. https://doi.org/10.20944/preprints202311.1625.v1
Bhattacharyya, A.S. Effect of Cracks at Shallow Depths during Nanoindentation in Titanium Diboride Hard Coatings. Preprints 2023, 2023111625. https://doi.org/10.20944/preprints202311.1625.v1
Bhattacharyya, A.S. Effect of Cracks at Shallow Depths during Nanoindentation in Titanium Diboride Hard Coatings. Preprints2023, 2023111625. https://doi.org/10.20944/preprints202311.1625.v1
APA Style
Bhattacharyya, A.S. (2023). Effect of Cracks at Shallow Depths during Nanoindentation in Titanium Diboride Hard Coatings. Preprints. https://doi.org/10.20944/preprints202311.1625.v1
Chicago/Turabian Style
Bhattacharyya, A.S. 2023 "Effect of Cracks at Shallow Depths during Nanoindentation in Titanium Diboride Hard Coatings" Preprints. https://doi.org/10.20944/preprints202311.1625.v1
Abstract
Hard coatings like Titanium diboride (TiB2) on silicon substrates are used for interconnects. micro-electro-mechanical devices and metallurgical protective coatings were analyzed based on shallow depths of nanoindentation penetration which involves a change in the nature of the contact from Hertzian to Pyramidal both in loading as well as unloading modes. Features like ductile fracture, linear unloading, and the creation of electrical conduction paths were analyzed. These high-precision features are influenced by the thickness and crystalline nature of the films and are significant for device fabrication.
Engineering, Metallurgy and Metallurgical Engineering
Copyright:
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
