Tajik, F.; Palasantzas, G. Dynamical Sensitivity of Three-Layer Micro Electromechanical Systems to the Optical Properties of the Intervening Liquid Layer. Physics2023, 5, 1081-1093.
Tajik, F.; Palasantzas, G. Dynamical Sensitivity of Three-Layer Micro Electromechanical Systems to the Optical Properties of the Intervening Liquid Layer. Physics 2023, 5, 1081-1093.
Tajik, F.; Palasantzas, G. Dynamical Sensitivity of Three-Layer Micro Electromechanical Systems to the Optical Properties of the Intervening Liquid Layer. Physics2023, 5, 1081-1093.
Tajik, F.; Palasantzas, G. Dynamical Sensitivity of Three-Layer Micro Electromechanical Systems to the Optical Properties of the Intervening Liquid Layer. Physics 2023, 5, 1081-1093.
Abstract
Here, we investigate the actuation dynamics of a micro device with different intervening liquids between the actuating components under the influence of Casimir and dissipative hydrodynamic forces. This is enabled via phase space portraits, which demonstrate that by increasing the dielectric response of the intervening layer the device may not come into stiction due to the decreasing in magnitude Casmir force. Moreover, it is feasible to expand area of motion using intervening liquids with lower dynamic viscosity or increasing the slip length of the intervening fluid. Finally, under the influence of an external driven force, which is the realistic case for possible applications, the system can reach stable oscillation at larger separations with an amplitude higher for the liquid that lead to lower Casimir and hydrodynamic forces.
Copyright:
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