Yu, F.; Xue, Y.; Zhong, C.; Song, J.; Nie, Q.; Hou, X.; Wang, B. Preparation of MgO Self-Epitaxial Films for YBCO High-Temperature Coated Conductors. Micromachines2023, 14, 1914.
Yu, F.; Xue, Y.; Zhong, C.; Song, J.; Nie, Q.; Hou, X.; Wang, B. Preparation of MgO Self-Epitaxial Films for YBCO High-Temperature Coated Conductors. Micromachines 2023, 14, 1914.
Yu, F.; Xue, Y.; Zhong, C.; Song, J.; Nie, Q.; Hou, X.; Wang, B. Preparation of MgO Self-Epitaxial Films for YBCO High-Temperature Coated Conductors. Micromachines2023, 14, 1914.
Yu, F.; Xue, Y.; Zhong, C.; Song, J.; Nie, Q.; Hou, X.; Wang, B. Preparation of MgO Self-Epitaxial Films for YBCO High-Temperature Coated Conductors. Micromachines 2023, 14, 1914.
Abstract
Ion beam-assisted deposition (IBAD) has been proposed as a promising texturing technology that uses film epitaxy method to obtain biaxial texture on a non-textured metal or compound substrate. Magnesium oxide (MgO) is the most well explored texturing material. In order to obtain the optimal biaxial texture, the actual thickness of the IBAD-MgO film must be controlled within 12 nm. Due to the bombardment of ion beams, IBAD-MgO has large lattice deformation, poor texture and many defects in the films. In this work, an additional homogeneous epitaxy MgO (epi-MgO) layer has been deposited on the IBAD-MgO layer by electron-beam evaporation. The biaxial texture can be optimized by the deposition of additional epi-MgO layer. The effects of growth temperature, film thickness, deposition rate and oxygen flux on the texture and morphology of the epi-MgO film were systematically studied. After the research of epi-MgO process, the best full width at half maximum (FWHM) values were 2.2 for the out-of-plane texture and 4.8° for the in-plane texture, respectively. Subsequently, the LaMnO3 cap layer and YBa2Cu3O7-x (YBCO) functional layer was deposited on the epi-MgO layer to test the quality of MgO layer. Finally, the critical current density of YBCO films is 6MA/cm2 (77K, 500nm, self-field), indicating that this research provides a high-quality MgO substrate for the YBCO layer.
Keywords
ion beam-assisted deposition; magnesium oxide; homogeneous epitaxy; fluorene
Subject
Engineering, Electrical and Electronic Engineering
Copyright:
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
