Polat, M.A.; Efeoglu, I.; Maleque, M.A.; Gulten, G.; Totik, Y.; Hassan, M.H.; Zulkifli, N.W. Ta/TaN Multilayer Thin Film Coatings with HiPIMS Technique for Tribological Applications. Preprints2023, 2023072021. https://doi.org/10.20944/preprints202307.2021.v1
APA Style
Polat, M.A., Efeoglu, I., Maleque, M.A., Gulten, G., Totik, Y., Hassan, M.H., & Zulkifli, N.W. (2023). Ta/TaN Multilayer Thin Film Coatings with HiPIMS Technique for Tribological Applications. Preprints. https://doi.org/10.20944/preprints202307.2021.v1
Chicago/Turabian Style
Polat, M.A., Masjuki Haji Hassan and Nurin Wahidah Zulkifli. 2023 "Ta/TaN Multilayer Thin Film Coatings with HiPIMS Technique for Tribological Applications" Preprints. https://doi.org/10.20944/preprints202307.2021.v1
Abstract
The aim of this work is to synthesis and characterize the Ta/TaN multilayer thin film coatings on 52100 tool steel under three different levels of N2 gas flow rate. The High Power Impulse Magnetron Sputtering (HiPIMS) technique was used for the deposition of Ta/TaN thin film multilayers on the substrate. Microstructure, coating thickness, composition, hardness and tribological properties of Ta/TaN multilayer coatings were characterized using scanning electron microscopy (SEM), Energy-dispersive X-ray spectroscopy (EDS), X-ray diffraction (XRD), microhardness tester and pin-on-disc tester, respectively. Adhesion property was evaluated via scratch testing of the thin film thin film layer. The lowest coefficient of friction was observed with the thin film layer of higher N2 gas flow rate due to the highest adhesion value of the coating on the surface. The obtained results on hardness, adhesion and coefficient of friction properties demonstrated that this Ta/TaN multilayer thin film coating can be used for tribological applications.
Keywords
Ta/TaN thin film layer; HiPIMS; Coefficient of friction; Adhesion property
Subject
Engineering, Metallurgy and Metallurgical Engineering
Copyright:
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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