TY - GENERIC DO - 10.20944/preprints202307.2021.v1 UR - http://dx.doi.org/10.20944/preprints202307.2021.v1 TI - Ta/TaN Multilayer Thin Film Coatings with HiPIMS Technique for Tribological Applications T2 - Preprints AU - Polat, Muhammed Alperen AU - Efeoglu, Ihsan AU - Maleque, Md Abdul AU - Gulten, Gokhan AU - Totik, Yasar AU - Hassan, Masjuki Haji AU - Zulkifli, Nurin Wahidah PY - 2023 DA - 2023/07/31 PB - Preprints