Anti-reflective Coatings Produced by Atomic Layer Deposition for Hybrid-Polymer 3D Micro-Optics

Darija Astrauskytė; Karolis Galvanauskas; Darius Gailevičius; Mantas Drazdys; Mangirdas Malinauskas; Lina Grineviciute

doi:10.20944/preprints202307.0930.v1

A peer-reviewed article of this Preprint also exists.

Astrauskytė, D.; Galvanauskas, K.; Gailevičius, D.; Drazdys, M.; Malinauskas, M.; Grineviciute, L. Anti-Reflective Coatings Produced via Atomic Layer Deposition for Hybrid Polymer 3D Micro-Optics. Nanomaterials 2023, 13, 2281. Astrauskytė, D.; Galvanauskas, K.; Gailevičius, D.; Drazdys, M.; Malinauskas, M.; Grineviciute, L. Anti-Reflective Coatings Produced via Atomic Layer Deposition for Hybrid Polymer 3D Micro-Optics. Nanomaterials 2023, 13, 2281.

Abstract

Laser direct writing allows for the fabrication of complex structures, which is particularly advantageous in micro-optic applications. However, the increasing demand for optics quality requires the lowest optical power loss, which can occur from unwanted reflections. This research demonstrates the possibility of forming an anti-reflective coating on hybrid-polymer micro-lenses fabricated by employing laser direct writing (LDW), without changing their geometry. Such coating deposited by atomic layer deposition (ALD) decreased the reflection from 3.3 % to 0.1 % at the wavelength of 633 nm for one surface of SZ2080™.

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Copyright: This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Anti-reflective Coatings Produced by Atomic Layer Deposition for Hybrid-Polymer 3D Micro-Optics

Abstract

Keywords

Subject

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