Preprint Article Version 1 Preserved in Portico This version is not peer-reviewed

Anti-reflective Coatings Produced by Atomic Layer Deposition for Hybrid-Polymer 3D Micro-Optics

Version 1 : Received: 13 July 2023 / Approved: 13 July 2023 / Online: 14 July 2023 (02:22:51 CEST)

A peer-reviewed article of this Preprint also exists.

Astrauskytė, D.; Galvanauskas, K.; Gailevičius, D.; Drazdys, M.; Malinauskas, M.; Grineviciute, L. Anti-Reflective Coatings Produced via Atomic Layer Deposition for Hybrid Polymer 3D Micro-Optics. Nanomaterials 2023, 13, 2281. Astrauskytė, D.; Galvanauskas, K.; Gailevičius, D.; Drazdys, M.; Malinauskas, M.; Grineviciute, L. Anti-Reflective Coatings Produced via Atomic Layer Deposition for Hybrid Polymer 3D Micro-Optics. Nanomaterials 2023, 13, 2281.

Abstract

Laser direct writing allows for the fabrication of complex structures, which is particularly advantageous in micro-optic applications. However, the increasing demand for optics quality requires the lowest optical power loss, which can occur from unwanted reflections. This research demonstrates the possibility of forming an anti-reflective coating on hybrid-polymer micro-lenses fabricated by employing laser direct writing (LDW), without changing their geometry. Such coating deposited by atomic layer deposition (ALD) decreased the reflection from 3.3 % to 0.1 % at the wavelength of 633 nm for one surface of SZ2080™.

Keywords

atomic layer deposition; anti-reflective coating; micro-optics; SZ2080™; multi-photon lithography; direct laser writing

Subject

Physical Sciences, Optics and Photonics

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