Preprint Article Version 1 Preserved in Portico This version is not peer-reviewed

Test Structures for the Characterization of the Gate Resistance in 16nm FinFET RF Transistors

Version 1 : Received: 2 June 2023 / Approved: 2 June 2023 / Online: 2 June 2023 (13:39:46 CEST)

A peer-reviewed article of this Preprint also exists.

Lauritano, M.; Baumgartner, P.; Ulusoy, A.Ç. Test Structures for the Characterization of the Gate Resistance in 16 nm FinFET RF Transistors. Electronics 2023, 12, 3011. Lauritano, M.; Baumgartner, P.; Ulusoy, A.Ç. Test Structures for the Characterization of the Gate Resistance in 16 nm FinFET RF Transistors. Electronics 2023, 12, 3011.

Abstract

The gate resistance is a parasitic element in transistors for RF and millimeter-wave circuits that can negatively impact power gain and noise figure. To develop accurate device models, a reliable measurement methodology is crucial. This article reviews the standard measurement methodology used in the literature and proposes also an additional method, which is evaluated using suitable test structures in a 16nm FinFET process. The advantages and disadvantages of the two approaches are discussed along with their respective application scenarios

Keywords

Gate Resistance; Characterization; de-embedding; radio-frequency MOSFETs (RF MOS- 7 FETs); FinFET

Subject

Engineering, Electrical and Electronic Engineering

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