Preprint Article Version 1 Preserved in Portico This version is not peer-reviewed

Study of 6√3 Reconstruction Conversion on the of 4H-SiC(0001) Surface to Quasi-free Epitaxial Graphene with Electron Diffraction

Version 1 : Received: 31 May 2023 / Approved: 2 June 2023 / Online: 2 June 2023 (10:03:28 CEST)

How to cite: Kotousova, I.S.; Lebedev, S.P.; Antipov, V.V.; Lebedev, A.A. Study of 6√3 Reconstruction Conversion on the of 4H-SiC(0001) Surface to Quasi-free Epitaxial Graphene with Electron Diffraction. Preprints 2023, 2023060138. https://doi.org/10.20944/preprints202306.0138.v1 Kotousova, I.S.; Lebedev, S.P.; Antipov, V.V.; Lebedev, A.A. Study of 6√3 Reconstruction Conversion on the of 4H-SiC(0001) Surface to Quasi-free Epitaxial Graphene with Electron Diffraction. Preprints 2023, 2023060138. https://doi.org/10.20944/preprints202306.0138.v1

Abstract

A structural study of the 6√3 reconstruction conversion on 4H-SiC substrate surface in an Ar medium with a short sublimation annealing time into quasi-free epitaxial graphene by means of hydrogen intercalation between the upper layer of SiC and the adjacent reconstructed layer was carried out using the technique of reflection high-energy electron diffraction (RHEED) characterizing the surface of a crystalline material. A slight violation of the 6√3 reconstruction layer formation uniformity was found. The results of the study of the crystal structure of quasi-free graphene and single-layer graphene comprising a buffer layer formed on 4H-SiC in the traditional way in an Ar atmosphere without intercalation were compared.

Keywords

silicon carbide; RHEED; reconstruction; hydrogen intercalation; quasi-free single-layer graphene

Subject

Physical Sciences, Condensed Matter Physics

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