Multi-Ion Modeling and Experiments Enable Consistent, High-Throughput Microcavity Array Generation via Mask Electrolyte Jet Machining

The controllability and consistency in the fabrication of micro-textures on large-scale remains a challenge for existing production processes. Mask electrolyte jet machining (MEJM) is an alternative to Jet-ECM for controllable and high-throughput surface microfabrication with more consistency of dimensional tolerances. This hybrid configuration combines the high-throughput of masked-ECM and the adjustable flow-field of jet-ECM. In this work, a duckbill jet nozzle was introduced to make MEJM more capable of batch micro-structuring. A multiphysics model was built to simulate the distribution of electrochemical reaction ions, the cur- rent density distribution and the evolution of the shape of the machined cavity. Experimental investigations are presented showing the influence of the machining voltage and nozzle moving speed on the micro cavity. Several 35 ×35 micro cavity arrays with a diameter of 24.92 − 11.73 µm and depth of 15.86 − 7.24 µm are generated on 304 stainless steel.