preprints.org > chemistry and materials science > surfaces, coatings and films > doi: 10.20944/preprints202208.0087.v1

Preprint Article Version 1 Preserved in Portico This version is not peer-reviewed

Version 1 : Received: 29 July 2022 / Approved: 3 August 2022 / Online: 3 August 2022 (11:08:37 CEST)

he present experiment concerns deposition of ZnO by ALD and subsequent growth of nanowires by chemical bath. We used a novel AISI 301 steel substrate with mechanical parameters that make it suitable to use as a piezoelectric component in an energy harvesting device. We found out that a thin layer of another oxide below ZnO provides outstanding adhesion. Without it, ZnO exhibits island growth and is mechanically unstable. Such prepared samples were placed under repeated mechanical stress. They showed a piezoelectric signal which is stable after hundreds of actuations. This shows good promise for use of our device based on ZnO, an earth-abundant and non-toxic material, as an alternative to widespread in piezo components but environmentally unfriendly PZT. The piezo layers generated enough power for operations performed by a IoT chip. The designed measurement setup allowed for the demonstration of an application of AISI 301 steel substrate coated with ZnO by atomic layer and chemical bath deposition techniques as a piezoelectric component capable of generating energies usable in Internet of Things applications.

piezoelectricity; energy harvesting; zinc oxide; nanostructures

Chemistry and Materials Science, Surfaces, Coatings and Films

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