Preprint Article Version 1 This version is not peer-reviewed

High-quality-factor Optical Microresonators Fabricated on Lithium Niobite Thin Film with an Electro-optical Tuning Range Spanning Over One Free Spectral Range

Version 1 : Received: 27 July 2020 / Approved: 28 July 2020 / Online: 28 July 2020 (13:58:37 CEST)

How to cite: Wang, Z.; Wu, C.; Fang, Z.; Wang, M.; Lin, J.; Wu, R.; Zhang, J.; Yu, J.; Wu, M.; Chu, W.; Lu, T.; Chen, G.; Cheng, Y. High-quality-factor Optical Microresonators Fabricated on Lithium Niobite Thin Film with an Electro-optical Tuning Range Spanning Over One Free Spectral Range. Preprints 2020, 2020070685 (doi: 10.20944/preprints202007.0685.v1). Wang, Z.; Wu, C.; Fang, Z.; Wang, M.; Lin, J.; Wu, R.; Zhang, J.; Yu, J.; Wu, M.; Chu, W.; Lu, T.; Chen, G.; Cheng, Y. High-quality-factor Optical Microresonators Fabricated on Lithium Niobite Thin Film with an Electro-optical Tuning Range Spanning Over One Free Spectral Range. Preprints 2020, 2020070685 (doi: 10.20944/preprints202007.0685.v1).

Abstract

We demonstrate high quality (intrinsic Q factor ~2.8×106) racetrack microresonators fabricated on lithium niobate (LN) thin film with a free spectral range (FSR) of ~86.38 pm. By integrating microelectrodes alongside the two straight arms of the racetrack resonator, the resonance wavelength around the 1550 nm can be red shifted by 92 pm when the electric voltage is raised from -100 V to 100 V. The microresonators of the tuning range spanning over a full FSR is fabricated using photolithography assisted chemo-mechanical etching (photolithography assisted chemo-mechanical etching, PLACE).

Subject Areas

microresonators; lithium niobate; electro-optical tuning; chemo-mechanical etching

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