Preprint Article Version 1 This version is not peer-reviewed

Electrical Characteristics and Reliability of Nitrogen-Stuffed Porous Low-k SiOCH/ Mn2O3-xN/Cu Integration

Version 1 : Received: 22 September 2019 / Approved: 23 September 2019 / Online: 23 September 2019 (06:04:11 CEST)

A peer-reviewed article of this Preprint also exists.

Cheng, Y.-L.; Lin, Y.-L.; Lee, C.-Y.; Chen, G.-S.; Fang, J.-S. Electrical Characteristics and Reliability of Nitrogen-Stuffed Porous Low-k SiOCH/Mn2O3-xN/Cu Integration. Molecules 2019, 24, 3882. Cheng, Y.-L.; Lin, Y.-L.; Lee, C.-Y.; Chen, G.-S.; Fang, J.-S. Electrical Characteristics and Reliability of Nitrogen-Stuffed Porous Low-k SiOCH/Mn2O3-xN/Cu Integration. Molecules 2019, 24, 3882.

Journal reference: Molecules 2019, 24, 3882
DOI: 10.3390/molecules24213882

Abstract

In our previous study, a novel barrier processing on a porous low-dielectric constant (low-k) film was developed: an ultrathin Mn oxide on a nitrogen-stuffed porous carbon-doped organosilica film (p-SiOCH(N)) as a barrier of the Cu film was fabricated. To form a better barrier Mn2O3-xN film, an additional annealing at 450°C was implemented. In this study, the electrical characteristics and reliability of this integrated Cu/Mn2O3-xN/p-SiOCH(N)/Si structure is investigated. The proposed Cu/Mn2O3-xN/p-SiOCH(N)/Si capacitors exhibited poor dielectric breakdown characteristics in the as-fabricted stage, although, less degradation was found after thermal stress. Moreover, its time-dependence-dielectric-breakdown electric-field acceleration factor slightly increased after thermal stress, leading to a larger dielectric lifetime in a low electric-field as compared to other MIS capacitors. Furthermore, its Cu barrier ability under electrical or thermal stress was improved. As a consequent, the proposed Cu/Mn2O3-xN/p-SiCOH(N) scheme is a promising integrity for back-end-of-line interconnects.

Subject Areas

porous low-dielectric-constant; barrier; MnOx; electrical characteristics; reliability; electric-field acceleration factor; TDDB

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