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Electrical Characteristics and Reliability of Nitrogen-Stuffed Porous Low-k SiOCH/ Mn₂O_3-xN/Cu Integration

This version is not peer-reviewed.

Yi-Lung Cheng^*,Yu-Lu Lin,

Chih-Yen Lee,Giin-Shan Chen,

Jau-Shiung Fang

Yi-Lung Cheng^*,Yu-Lu Lin,

Chih-Yen Lee,Giin-Shan Chen,

Jau-Shiung Fang

This version is not peer-reviewed.

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