Preprint Article Version 1 This version is not peer-reviewed

A Fuzzy Inference System for Unsupervised Deblurring of Motion Blur in Electron Beam Calibration

Version 1 : Received: 18 October 2018 / Approved: 19 October 2018 / Online: 19 October 2018 (04:53:27 CEST)

A peer-reviewed article of this Preprint also exists.

Hosseinzadeh, S. A Fuzzy Inference System for Unsupervised Deblurring of Motion Blur in Electron Beam Calibration. Appl. Syst. Innov. 2018, 1, 48. Hosseinzadeh, S. A Fuzzy Inference System for Unsupervised Deblurring of Motion Blur in Electron Beam Calibration. Appl. Syst. Innov. 2018, 1, 48.

Journal reference: Appl. Syst. Innov. 2018, 1, 48
DOI: 10.3390/asi1040048

Abstract

This paper presents a novel method of restoring the electron beam (EB) measurements that are degraded by linear motion blur. This is based on a Fuzzy Inference System (FIS) and Wiener inverse filter, together providing autonomy, reliability, flexibility and real-time execution. This system is capable of restoring highly degraded signals without requiring the exact knowledge of EB probe size. The FIS is formed of three inputs, eight fuzzy rules and one output. The FIS is responsible to monitor the restoration results, grade their validity and choose the one that yields to a better grade. These grades are produced autonomously by analyzing results of Wiener inverse filter. To benchmark the performance of the system, ground truth signals obtained using an 18 um wire probe are compared with the restorations. Main aims are therefore a) Provide unsupervised deblurring for device independent EB measurement; b) Improve the reliability of the process; c) Apply deblurring without knowing the probe size. These, further facilitates the deployment and manufacturing of EB probes and probe independent and accurate EB characterization. It also makes restoration of previously collected EB measurements easier, where the probe sizes are not known or recorded.

Subject Areas

fuzzy inference system; fuzzy logics; linear motion blur; fuzzy debluring; electron beam calibration; signal & image processing

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