Measurement of High Numerical Aperture Cylindrical Surface with Iterative Stitching Algorithm

There are some limitations in the null test measurement in the stitching interferometry. In order to meet the null test conditions, the moving distance between the sub-apertures often deviates from the theoretical preset distance, which leads to a position deviation of sub-apertures under measurements. To overcome this problem, an algorithm for data processing is proposed. We used iterative calculation of the deviations between the sub-apertures to adjust their positions, to ensure the local validity of the linear approximation algorithm and realize the exact stitching. A cylindrical lens as an object for experimental examination of the proposed method was taken. The obtained results demonstrate the validity, reliability and feasibility of our iterative stitching algorithm.