Article
Version 1
Preserved in Portico This version is not peer-reviewed
Self-Aligned Interdigitated Transducers for Acoustofluidics
Version 1
: Received: 16 November 2016 / Approved: 17 November 2016 / Online: 17 November 2016 (10:28:21 CET)
Version 2 : Received: 22 November 2016 / Approved: 22 November 2016 / Online: 22 November 2016 (09:41:32 CET)
Version 2 : Received: 22 November 2016 / Approved: 22 November 2016 / Online: 22 November 2016 (09:41:32 CET)
A peer-reviewed article of this Preprint also exists.
Ma, Z.; Teo, A.J.T.; Tan, S.H.; Ai, Y.; Nguyen, N.-T. Self-Aligned Interdigitated Transducers for Acoustofluidics. Micromachines 2016, 7, 216. Ma, Z.; Teo, A.J.T.; Tan, S.H.; Ai, Y.; Nguyen, N.-T. Self-Aligned Interdigitated Transducers for Acoustofluidics. Micromachines 2016, 7, 216.
Abstract
Surface acoustic wave (SAW) is effective for the manipulation of fluids and particles in microscale. The current approach of integrating interdigitated transducers (IDTs) for SAW generation into microfluidic channels involves complex and laborious microfabrication steps. These steps often require the full access to clean room facilities and hours to align the transducers to the precise location. This work presents an affordable and innovative method for fabricating SAW-based microfluidic devices without the need of clean room facilities and alignment. The IDTs and microfluidic channels are fabricated in the same process and thus precisely self-aligned in accordance with the device design. With the use of the developed fabrication approach, a few types of different SAW-based microfluidic devices have been fabricated and demonstrated for particle separation and active droplet generation.
Keywords
surface acoustic wave; acoustofluidics; microfluidics; interdigitated transducers
Subject
Engineering, Mechanical Engineering
Copyright: This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Comments (2)
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Commenter: Jeonghun Nam
The commenter has declared there is no conflict of interests.
Therefore, I think that authors of this manuscript need to cite the previous article;
http://pubs.rsc.org/en/content/articlelanding/2016/lc/c6lc00827e#!divAbstract
Commenter: Nam-Trung Nguyen
Commenter's Conflict of Interests: I'm one of the authors of the paper