ARTICLE
|
doi:10.20944/preprints201702.0094.v1
Subject:
Chemistry And Materials Science,
Materials Science And Technology
Keywords:
laser wavelength; polysilicon; laser damage; thermal shock
Online: 27 February 2017 (06:56:01 CET)
ARTICLE
|
doi:10.20944/preprints202110.0264.v2
Subject:
Engineering,
Electrical And Electronic Engineering
Keywords:
3D NAND; hole profile; mechanical stress; polysilicon channel; scaling; TCAD
Online: 21 October 2021 (12:12:18 CEST)