Microbolometer is the most common uncooled infrared technique that allows to achieve 50mK-temperature resolution on the scene. However, this approach has to struggle with both the self-heating inherent to the resistive readout principle and the 1/f noise. We present an alternative approach that consists in using micro / nanoresonators vibrating according to a torsional mode, and whose resonant frequency changes with the incident IR-radiation. Dense arrays of such electromechanical structures were fabricated with a 12µm-pitch at low temperature allowing their integration on CMOS circuits according to a post-processing method. H-shape pixels with 9 µm-long nano-rods and a cross-section of 250 × 30 nm² were fabricated to provide large thermal responses, whose experimental measurements reached up to 1024 Hz/nW. These electromechanical resonators featured a noise equivalent power of 140pW for a response time of less than 1 ms. To our knowledge, these performance are unrivaled with such small dimensions. We also showed that a temperature sensitivity of 20 mK within 100ms-integration time is conceivable at a 12µm-pitch by co-integrating the resonators with their readout electronics and suggesting a new readout scheme. This sensitivity could be reached at short-term by depositing on top of the nano-rods a vanadium oxide layer having a phase-transition that could possibly enhance the thermal response by one order of magnitude.

Knowledge of a lasers beam’s profile throughout a laser system and experiment can help immensely in diagnosing laser problems and assisting in beam alignment and focusing at a sample. Obtaining such profiles is a trivial task in the ultraviolet-visible wavelength range but more challenging with near-infrared to infrared beams. Scientific grade bolometer arrays, suitable for such a task, do exist but are extremely costly, relatively large and have a large pixel size, of the order of 80 μm, which is adequate for profiling larger beams but poses an issue when trying to profile sub 100 μm beams for example at a focal point. This communication identifies a micro-bolometer array for near- to mid-infrared laser beam profiling, which is extremely low cost. In addition, the device is very compact, enabling use in confined spaces, and has a small, 12 μm, pixel size permitting the profiling of focused laser beams. The best scientific grade device identified has a pixel size of 17 μm. This device is a powerful tool for infrared laser spectroscopists, reducing the time required to measure the spot size of beams and to achieve spatial overlap of multiple infrared beams as used in two-dimensional infrared spectroscopy, saving many hours of setup time. The use of the bolometer array as a spectrographic detector and probe of long-term beam drifts is also demonstrated.

The response of the Cold-Electron Bolometers (CEBs), integrated into a 2-D array of dipole antennas, has been measured by irradiation from YBa$_2$Cu$_3$O$_{7-\delta}$ (YBCO) 50 $\mu$m long Josephson junction into the THz region at frequencies from 0.1 to 0.8 THz. The possibility of controlling the amplitude-frequency characteristic is demonstrated by the external magnetic field in the traveling wave regime of a long Josephson junction. YBCO junction has been formed on the bicrystal Zr$_{1-x}$Y$_x$O$_2$ (YSZ) substrate by magnetron sputtering and etching of the film. CEBs have been fabricated using an Al multilayer structure by a self-aligned shadow evaporation technique on Si substrate. Both receiver and oscillator have been located inside the same cryostat at 0.3K and 2.7K plates, respectively.