ARTICLE
|
doi:10.20944/preprints202312.1968.v1
Subject:
Physical Sciences,
Applied Physics
Keywords:
micro/nanoelectromechanical system (MEMS/NEMS); membrane; crystalline anisotropy; single-crystal material; silicon-on-insulator (SOI); deformation
Online: 26 December 2023 (10:09:08 CET)