ARTICLE | doi:10.20944/preprints202007.0685.v1
Subject: Physical Sciences, Applied Physics Keywords: microresonators; lithium niobate; electro-optical tuning; chemo-mechanical etching
Online: 28 July 2020 (13:58:37 CEST)
We demonstrate high quality (intrinsic Q factor ~2.8×106) racetrack microresonators fabricated on lithium niobate (LN) thin film with a free spectral range (FSR) of ~86.38 pm. By integrating microelectrodes alongside the two straight arms of the racetrack resonator, the resonance wavelength around the 1550 nm can be red shifted by 92 pm when the electric voltage is raised from -100 V to 100 V. The microresonators of the tuning range spanning over a full FSR is fabricated using photolithography assisted chemo-mechanical etching (photolithography assisted chemo-mechanical etching, PLACE).