ARTICLE
|
doi:10.20944/preprints202303.0348.v1
Subject:
Biology And Life Sciences,
Plant Sciences
Keywords:
low-k dielectrics; organosilica glass; interconnects; photoluminescence; oxygen deficient centers
Online: 20 March 2023 (07:05:55 CET)
ARTICLE
|
doi:10.20944/preprints202107.0162.v1
Subject:
Chemistry And Materials Science,
Surfaces, Coatings And Films
Keywords:
tantalum nitride; electrical properties; structural properties; elemental composition; spectroscopic ellipsometry; optical properties
Online: 6 July 2021 (17:01:45 CEST)