ARTICLE
|
doi:10.20944/preprints202305.1408.v1
Subject:
Physical Sciences,
Fluids And Plasmas Physics
Keywords:
low-pressure Ar-O2 plasma; single Langmuir probe; electron density; electron temperature; elec-tron energy distribution function; low-frequency AC power supply
Online: 19 May 2023 (08:20:10 CEST)