Submitted:
24 June 2026
Posted:
25 June 2026
You are already at the latest version
Abstract
Keywords:
1. Introduction
2. Materials and Methods
2.1. Copper Film Deposition
Vacuum and Chamber Layout
Evaporation Source and Thermal Management
Substrate Mounting and Deposition Geometry
Thickness Control and Process Protocol
Integration with Inert Handling (Optional)
2.2. Scanning Electron Microscopy
2.3. X-Ray Diffraction Analysis
2.4. X-Ray Photoelectron Spectroscopy
2.5. Spectroscopic Ellipsometry and Optical Transmittance
2.6. Four-Point Probe Measurements
3. Results and Discussion
3.1. Crystal Structure (XRD)
3.2. Surface Morphology (SEM)
3.3. Surface Chemistry (XPS)
| Name | FWHM (eV) | Area(P) (CPS·eV) | Atomic (%) |
|---|---|---|---|
| Cu 2p | 1.59 | 789151.34 | 80.63 |
| C 1s | 2.06 | 8582.42 | 13.99 |
| O 1s | 4.62 | 8428.21 | 5.38 |
3.4. Electrical vs Thickness
| Copper thickness (nm) | Sheet resistance () | Resistivity (cm) |
|---|---|---|
| 40 | 30 | 120 |
| 100 | 1.5 | 15 |
| 250 | 0.5 | 12.5 |
3.5. Optical Transmittance/Ellipsometry
3.6. Optoelectronic Trade-Off and Electrode Figure-of-Merit
4. Conclusions
Author Contributions
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Acknowledgments
Conflicts of Interest
Sample Availability
Abbreviations
| FoM | Figure of merit |
| SE | Spectroscopic ellipsometry |
| SEM | Scanning electron microscopy |
| TCE | Transparent conductive electrode |
| TCO | Transparent conductive oxide |
| XPS | X-ray photoelectron spectroscopy |
| XRD | X-ray diffraction |
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| Thickness (nm) | () | (%) | () | |
|---|---|---|---|---|
| 40 | 30.0 | 0.58526 | 58.526 | |
| 100 | 1.5 | 0.06693 | 6.693 | |
| 250 | 0.5 | 0.00297 | 0.297 |
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