Submitted:
07 August 2024
Posted:
08 August 2024
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Abstract
Keywords:
1. Introduction
2. Materials and Methods
3. Results

4. Discussion
5. Conclusions
Supplementary Materials
Author Contributions
Data Availability Statement
Acknowledgments
Conflicts of Interest
References
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| Sample | Fluency (laser energy density) |
Laser pulses | Repetition rate | Deposition time (s) | Substrate temperature | Gas pressure (O2) |
| YFO/Si-1 (S1) | 2 J/cm2 | 7000 | 5 Hz | 1400 | 723.15 °K | 1.3e-2 mbar |
| YFO/Si-2 (S2) | 9000 | 1800 | ||||
| YFO/Si-3 (S3) | 12000 | 2400 |
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